Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2002 Vol. 187; Iss. 2
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Langmuir probe data analysis including the multi-component multiply charged nature of electron cyclotron resonance ion source plasma
L. Kenéz, S. Biri, J. Karácsony, A. ValekVolume:
187
Year:
2002
Language:
english
Pages:
10
DOI:
10.1016/s0168-583x(01)00927-2
File:
PDF, 271 KB
english, 2002