Characterisation of hydrogen and erbium in carbon layers...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2002 Vol. 188; Iss. 1-4

Characterisation of hydrogen and erbium in carbon layers fabricated by PACVD for optical applications

A. Macková, V. Peřina, V. Hnatowicz, P. Nekvindová, V. Prajzler, I. Hüttel, J. Špirková
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Volume:
188
Year:
2002
Language:
english
Pages:
3
DOI:
10.1016/s0168-583x(01)01036-9
File:
PDF, 59 KB
english, 2002
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