Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2002 Vol. 188; Iss. 1-4
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RBS, SY-XRF, INAA and ICP-IDMS of antimony implanted in silicon – A multi-method approach to characterize and certify a reference material
K.H. Ecker, U. Wätjen, A. Berger, L. Persson, W. Pritzkow, M. Radtke, H. RiesemeierVolume:
188
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0168-583x(01)01038-2
File:
PDF, 96 KB
english, 2002