Halogen lamp-assisted high rate deposition of both hard and...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2002 Vol. 192; Iss. 3

Halogen lamp-assisted high rate deposition of both hard and elastic carbon films from CH2I2

Mikael Lindstam, Mats Boman, Klaus Piglmayer
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Volume:
192
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0168-583x(01)01168-5
File:
PDF, 127 KB
english, 2002
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