Characterization of ion-beam-induced amorphous structures...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2002 Vol. 190; Iss. 1-4

Characterization of ion-beam-induced amorphous structures by advanced electron microscopy

Manabu Ishimaru, In-Tae Bae, Tadakatsu Ohkubo, Yoshihiko Hirotsu, Kurt E. Sickafus
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Volume:
190
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(01)01223-x
File:
PDF, 156 KB
english, 2002
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