Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2002 Vol. 190; Iss. 1-4
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Secondary ion mass spectrometry with gas cluster ion beams
Noriaki Toyoda, Jiro Matsuo, Takaaki Aoki, Isao Yamada, David B. FennerVolume:
190
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(02)00463-9
File:
PDF, 357 KB
english, 2002