Simulation of ion-irradiation stimulated Ge nanocluster...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2002 Vol. 191; Iss. 1-4

Simulation of ion-irradiation stimulated Ge nanocluster formation in gate oxides containing GeO2

Pavel Novikov, Karl-Heinz Heinig, Arne Larsen, Anatoly Dvurechenskii
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Volume:
191
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0168-583x(02)00593-1
File:
PDF, 241 KB
english, 2002
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