Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2002 Vol. 191; Iss. 1-4
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Copper ion implantation and laser annealing of silica
A.L. Stepanov, D.E. Hole, P.D. TownsendVolume:
191
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(02)00594-3
File:
PDF, 345 KB
english, 2002