Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2002 Vol. 191; Iss. 1-4
Impact of ambient atmosphere on as-implanted amorphous insulating layers
B. Schmidt, D. Grambole, F. HerrmannVolume:
191
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(02)00597-9
File:
PDF, 166 KB
english, 2002