Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2002 Vol. 191; Iss. 1-4
![](/img/cover-not-exists.png)
Anomalous depth distribution of Fe and Co atoms in polyimide implanted to high fluence
V.N. Popok, R.I. Khaibullin, V.V. Bazarov, V.F. Valeev, V. Hnatowicz, A. Mackova, V.B. OdzhaevVolume:
191
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(02)00635-3
File:
PDF, 162 KB
english, 2002