A metastable-induced electron spectroscopy study on the...

A metastable-induced electron spectroscopy study on the promotion of nitridation by oxygen/alkali pre-adsorbates at Si(1 0 0) surfaces

S Nishigaki, T Sugiman, T Ikari, I Yokoh, K Yamada, M Naitoh
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Volume:
193
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0168-583x(02)00821-2
File:
PDF, 148 KB
english, 2002
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