Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2002 Vol. 193; Iss. 1-4
A metastable-induced electron spectroscopy study on the promotion of nitridation by oxygen/alkali pre-adsorbates at Si(1 0 0) surfaces
S Nishigaki, T Sugiman, T Ikari, I Yokoh, K Yamada, M NaitohVolume:
193
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0168-583x(02)00821-2
File:
PDF, 148 KB
english, 2002