Retardation of strain relaxation in Si/SiGe/Si...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2002 Vol. 194; Iss. 4

Retardation of strain relaxation in Si/SiGe/Si heterostructures during high temperature oxidation

ChangChun Chen, A.-C Lindgren, ShiLi Zhang, DeZhang Zhu
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Volume:
194
Year:
2002
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(02)01035-2
File:
PDF, 189 KB
english, 2002
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