Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2002 Vol. 196; Iss. 1-2
The estimation of sputtering yields for SiC and Si
Gernot Ecke, Rastislav Kosiba, Vladimir Kharlamov, Yuri Trushin, Jörg PezoldtVolume:
196
Year:
2002
Language:
english
Pages:
12
DOI:
10.1016/s0168-583x(02)01273-9
File:
PDF, 226 KB
english, 2002