Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2003 Vol. 202; Iss. none
Kinetic Monte Carlo simulation of self-organized pattern formation in thin film deposition
F. Elsholz, M. Meixner, E. SchöllVolume:
202
Year:
2003
Language:
english
Pages:
6
DOI:
10.1016/s0168-583x(02)01865-7
File:
PDF, 247 KB
english, 2003