Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2003 Vol. 202; Iss. none
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Computer modeling and electron microscopy of silicon surfaces irradiated by cluster ion impacts
Z. Insepov, L.P. Allen, C. Santeufemio, K.S. Jones, I. YamadaVolume:
202
Year:
2003
Language:
english
Pages:
8
DOI:
10.1016/s0168-583x(02)01867-0
File:
PDF, 582 KB
english, 2003