Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2003 Vol. 203; Iss. none
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Non-linear effects in Ta sputtering by Aum− ions
S.N. Morozov, U.Kh. RasulevVolume:
203
Year:
2003
Language:
english
Pages:
6
DOI:
10.1016/s0168-583x(02)02216-4
File:
PDF, 144 KB
english, 2003