Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2003 Vol. 203; Iss. none
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Energy distributions of Ga+ and In+ secondary ions sputtered from AIIIBV compound semiconductors by noble gas ions: Mass-dependence of the high-energy yield on the second component (P, As, Sb) of the compounds
A. Tolstogouzov, S. Daolio, C. Pagura, C.L. Greenwood, D.S. Karpuzov, N.S. McIntyreVolume:
203
Year:
2003
Language:
english
Pages:
7
DOI:
10.1016/s0168-583x(02)02217-6
File:
PDF, 134 KB
english, 2003