Cleaning of diffusion bonding surface by argon ion...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2003 Vol. 206; Iss. none

Cleaning of diffusion bonding surface by argon ion bombardment treatment

Airu Wang, Osamu Ohashi, Norio Yamaguchi, Masanori Aoki, Yasuo Higashi, Nobuteru Hitomi
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Volume:
206
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(03)00732-8
File:
PDF, 211 KB
english, 2003
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