Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2003 Vol. 206; Iss. none
Electron and γ-irradiation of ion implanted MOS structures with different oxide thickness
S. Kaschieva, S.N. Dmitriev, Ch. AngelovVolume:
206
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(03)00792-4
File:
PDF, 170 KB
english, 2003