Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2003 Vol. 206; Iss. none
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Novel nano-fabrication technique utilizing ion beam
Noriko Nitta, Masafumi TaniwakiVolume:
206
Year:
2003
Language:
english
Pages:
4
DOI:
10.1016/s0168-583x(03)00802-4
File:
PDF, 130 KB
english, 2003