Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2003 Vol. 206; Iss. none
Photon-enhanced secondary electron emission at target in plasma immersion ion implantation
Keiji Nakamura, Masaki Ando, Hideo SugaiVolume:
206
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(03)00852-8
File:
PDF, 175 KB
english, 2003