Ion beam induced epitaxial crystallization of silicon...

Ion beam induced epitaxial crystallization of silicon implanted with heavy ions

Ch. Angelov, M. Takai, A. Kinomura, Y. Horino, A. Peeva, W. Skorupa
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Volume:
206
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(03)00859-0
File:
PDF, 136 KB
english, 2003
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