Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2003 Vol. 206; Iss. none
Ion beam induced epitaxial crystallization of silicon implanted with heavy ions
Ch. Angelov, M. Takai, A. Kinomura, Y. Horino, A. Peeva, W. SkorupaVolume:
206
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(03)00859-0
File:
PDF, 136 KB
english, 2003