Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2003 Vol. 206; Iss. none
Increasing the fracture toughness of silicon by ion implantation
J.G. Swadener, M. NastasiVolume:
206
Year:
2003
Language:
english
Pages:
4
DOI:
10.1016/s0168-583x(03)00865-6
File:
PDF, 132 KB
english, 2003