Defect characteristics by boron cluster ion implantation

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2003 Vol. 206; Iss. none

Defect characteristics by boron cluster ion implantation

Takaaki Aoki, Jiro Matsuo, Gikan Takaoka, Noriaki Toyoda, Isao Yamada
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Volume:
206
Year:
2003
Language:
english
Pages:
6
DOI:
10.1016/s0168-583x(03)00878-4
File:
PDF, 157 KB
english, 2003
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