NEXAFS study on substrate temperature dependence of DLC...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2003 Vol. 206; Iss. none

NEXAFS study on substrate temperature dependence of DLC films formed by Ar cluster ion beam assisted deposition

K. Kanda, Y. Shimizugawa, Y. Haruyama, I. Yamada, S. Matsui, T. Kitagawa, H. Tsubakino, T. Gejo
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Volume:
206
Year:
2003
Language:
english
Pages:
4
DOI:
10.1016/s0168-583x(03)00888-7
File:
PDF, 89 KB
english, 2003
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