Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2003 Vol. 206; Iss. none
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Influence of residual Ar+ in Ar cluster ion beam for DLC film formation
Teruyuki Kitagawa, Kazuya Miyauchi, Noriaki Toyoda, Kazuhiro Kanda, Tokumi Ikeda, Harushige Tsubakino, Jiro Matsuo, Shinji Matsui, Isao YamadaVolume:
206
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(03)00889-9
File:
PDF, 154 KB
english, 2003