Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2003 Vol. 206; Iss. none
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Electrical properties of high-dose nitrogen-implanted and rapid thermal annealed 6H–SiC
K. Abe, O. Eryu, O. Kogi, K. NakashimaVolume:
206
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(03)00902-9
File:
PDF, 203 KB
english, 2003