Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2003 Vol. 206; Iss. none
Amorphous structures of silicon carbonitride formed by high-dose nitrogen ion implantation into silicon carbide
Manabu Ishimaru, Muneyuki Naito, Yoshihiko Hirotsu, Kurt E. SickafusVolume:
206
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(03)00909-1
File:
PDF, 146 KB
english, 2003