Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2003 Vol. 208; Iss. none
Developments in low energy electron beam machinery and processes
S.V. Nablo, J. Chrusciel, D.A. Cleghorn, I. RangwallaVolume:
208
Year:
2003
Language:
english
Pages:
8
DOI:
10.1016/s0168-583x(03)00985-6
File:
PDF, 332 KB
english, 2003