Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2003 Vol. 210; Iss. none
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Proton beam micromachining dose normalization for SU-8 using ionoluminescence detection
Chammika N.B. Udalagama, Andrew A. Bettiol, J.A. van Kan, Frank WattVolume:
210
Year:
2003
Language:
english
Pages:
4
DOI:
10.1016/s0168-583x(03)01023-1
File:
PDF, 330 KB
english, 2003