Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2003 Vol. 211; Iss. 2
Influence of the target and working gas on the composition of silicon nitride thin films prepared by reactive RF-sputtering
M. Vila, C. Prieto, J. Garcı́a-López, M.A. RespaldizaVolume:
211
Year:
2003
Language:
english
Pages:
7
DOI:
10.1016/s0168-583x(03)01211-4
File:
PDF, 665 KB
english, 2003