Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
2003 Vol. 212; Iss. none
Substitution and diffusion behaviour of MeV implanted Sb in Si(1 0 0) after carbon irradiation
Soma Dey, Shikha VarmaVolume:
212
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(03)01489-7
File:
PDF, 337 KB
english, 2003