Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 19-20; Iss. part-P1
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Damage created in silicon by BFn+ (1≤ n ≤ 3) and PFn+ (1⪯ n:≤ 5) implantations
A. Grob, J.J. Grob, A. GolanskiVolume:
19-20
Year:
1987
Language:
english
Pages:
6
DOI:
10.1016/s0168-583x(87)80014-9
File:
PDF, 386 KB
english, 1987