Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 19-20; Iss. part-P2
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Self annealing effects in P+ implanted silicon
M. Berti, A.V. Drigo, E. Gabilli, R. Lotti, G. Lulli, P.G. Merli, M. Vittori AntisariVolume:
19-20
Year:
1987
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(87)80094-0
File:
PDF, 1.01 MB
english, 1987