Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 19-20; Iss. part-P2
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Explosive crystallization of ion-implanted silicon layers
G. Andrä, H.D. Geiler, E. Glaser, G. Götz, M. Wagner, K.H. HeinigVolume:
19-20
Year:
1987
Language:
english
Pages:
6
DOI:
10.1016/s0168-583x(87)80114-3
File:
PDF, 4.19 MB
english, 1987