Optical properties of thermally stabilized ion implantation...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1987 Vol. 19-20; Iss. part-P2

Optical properties of thermally stabilized ion implantation amorphized silicon

M. Fried, T. Lohner, E. Jároli, G. Vízkelethy, E. Kótai, J. Gyulai, A. Bíró, J. Ádám, M. Somogyi, H. Kerkow
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Volume:
19-20
Year:
1987
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(87)80115-5
File:
PDF, 344 KB
english, 1987
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