Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 19-20; Iss. part-P2
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Optical study of high dose implanted, laser annealed silicon
A. Borghesi, G. Guizzetti, L. Nosenzo, A. Stella, S.U. Campisano, E. RiminiVolume:
19-20
Year:
1987
Language:
english
Pages:
3
DOI:
10.1016/s0168-583x(87)80116-7
File:
PDF, 188 KB
english, 1987