Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 19-20; Iss. part-P2
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Ion projection lithography for sub-micron modification of materials
Gerhard Stengl, Hans Löschner, Peter WolfVolume:
19-20
Year:
1987
Language:
english
Pages:
8
DOI:
10.1016/s0168-583x(87)80197-0
File:
PDF, 4.36 MB
english, 1987