Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 19-20; Iss. part-P2
The role of noble gas ion bombardment in etching reactions
A.W. KolfschotenVolume:
19-20
Year:
1987
Language:
english
Pages:
8
DOI:
10.1016/s0168-583x(87)80199-4
File:
PDF, 610 KB
english, 1987