Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1987 Vol. 24-25; Iss. part-P2
Multi-MeV accelerator system for ion implantation
Daryl DiBitonto, F.R. Huson, Peter M. McIntyre, Alireza Nassiri, Deepak Raparia, Charles A. SwensonVolume:
24-25
Year:
1987
Language:
english
Pages:
4
DOI:
10.1016/s0168-583x(87)80246-x
File:
PDF, 478 KB
english, 1987