Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1997 Vol. 121; Iss. 1-4
Plasma doping optimization for ultra-shallow junctions
Erin C. Jones, Nathan W. CheungVolume:
121
Year:
1997
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(96)00372-2
File:
PDF, 448 KB
english, 1997