Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1997 Vol. 121; Iss. 1-4
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Formation of an ohmic electrode in SiC using a pulsed laser irradiation method
Osamu Eryu, Takayuki Kume, Kenshiro Nakashima, Toshitake Nakata, Morio InoueVolume:
121
Year:
1997
Language:
english
Pages:
3
DOI:
10.1016/s0168-583x(96)00384-9
File:
PDF, 277 KB
english, 1997