Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1997 Vol. 121; Iss. 1-4
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Preparation of boron nitride films by multi-source plasma CVD method
R. Nonogaki, S. Yamada, T. WadaVolume:
121
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0168-583x(96)00388-6
File:
PDF, 354 KB
english, 1997