Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1997 Vol. 121; Iss. 1-4
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Properties of a new organo silver compound for MOCVD
Atsushi Itsuki, Hiroto Uchida, Masamitsu Satou, Katsumi OgiVolume:
121
Year:
1997
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(96)00437-5
File:
PDF, 366 KB
english, 1997