Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1996 Vol. 120; Iss. 1-4
Ion beam processing of single crystalline silicon carbide
W. Skorupa, V. Heera, Y. Pacaud, H. WeishartVolume:
120
Year:
1996
Language:
english
Pages:
7
DOI:
10.1016/s0168-583x(96)00491-0
File:
PDF, 773 KB
english, 1996