Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1997 Vol. 121; Iss. 1-4
Vacuum characteristics of TiN film coated on the interior surface of a vacuum duct
Michio Minato, Yoshio ItohVolume:
121
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0168-583x(96)00544-7
File:
PDF, 370 KB
english, 1997