Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1997 Vol. 122; Iss. 3
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Morphology of Mo particles and their incorporation into the growing film during vacuum arc deposition
B.B. Straumal, W. Gust, N.F. Vershinin, V.G. Glebovsky, H. Brongersma, R. FaulknerVolume:
122
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0168-583x(96)00570-8
File:
PDF, 385 KB
english, 1997