Application of nitrogen implantation to ULSI

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1997 Vol. 121; Iss. 1-4

Application of nitrogen implantation to ULSI

Takashi Murakami, Takashi Kuroi, Yoji Kawasaki, Masahide Inuishi, Yasuji Matsui, Akihiko Yasuoka
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Volume:
121
Year:
1997
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(96)00583-6
File:
PDF, 479 KB
english, 1997
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