Range parameter study of Au and Bi implanted into carbon...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1997 Vol. 122; Iss. 1

Range parameter study of Au and Bi implanted into carbon nitride films

J.R. Kaschny, R. Pérez, M. Behar, H. Hofsaess, D. Fink
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Volume:
122
Year:
1997
Language:
english
Pages:
5
DOI:
10.1016/s0168-583x(96)00625-8
File:
PDF, 536 KB
english, 1997
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