Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1997 Vol. 121; Iss. 1-4
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SiO bond formation by oxygen implantation into silicon
Kenji Kajiyama, Tomoaki Yoneda, Yuji Fujioka, Yoshiaki KidoVolume:
121
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0168-583x(96)00649-0
File:
PDF, 361 KB
english, 1997